UV/Ozone Treatment and Open-Air Copper Plasmonics

نویسندگان

چکیده

Abstract Thin copper films with thickness ∼28 nm deposited on SiO 2 substrate the vacuum electron beam evaporation method and treated by UV-ozone are studied. It was found that a treatment of film causes rapid formation thin ∼3-4 oxide film. XPS analysis showed CuO predominates in this The formed effectively protects against following oxidation. presented is simpler cheaper approach compared to many other ways form protective coatings preserve its functional properties. This can be useful nanoelectronic, nanooptical, biosensors applications.

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ژورنال

عنوان ژورنال: Journal of Physics: Conference Series

سال: 2021

ISSN: ['1742-6588', '1742-6596']

DOI: https://doi.org/10.1088/1742-6596/2015/1/012148